Dr. Luc Van den hove (President & CEO, Imec) and Dr. Sang-il Park (Chairman & CEO, Park Systems)
Park Systems, the global leader and innovator of Atomic Force Microscopy and Metrology solutions, and imec, world-leading R&D and innovation hub in nanoelectronics and digital technologies, have signed the 2nd Joint Development Project (JDP) within 4 years to increase the development efforts for future generation in-line AFM metrology solutions. The official signing ceremony has taken place February 17, 2020, at imec's headquarters in Leuven, Belgium.
The new JDP extends the collaboration to explore new frontiers of AFM metrology solutions for the wafer semiconductor sector. As enhanced possibilities of inline automated AFM in semiconductor research, such as surface roughness, critical dimension (CD) and sidewall roughness, have been successfully explored in the first JDP, the second JDP targets multiple strategic developments to address the current metrological challenges of continuously downscaling the geometrical dimensions of devices and 3D assembly stacking.
"Collaboration with leading research centers such as imec is crucial for us to deliver the best technological solutions addressing the needs of research and industrial markets. I am very glad to partner with imec on this mission again, and I look forward to a fruitful further cooperation," commented Dr. Sang-il Park, the CEO of Park Systems.
"Park Systems has grown a lot in the past years, which is definitely helpful also for our joint development efforts with Park. The new joint development project that we have just signed showcases the best and beautiful collaboration we have together," added Kristof Paredis, R&D Manager from imec.
After signing the first JDP in 2015 Park Systems officially joined imec's Industrial Affiliation Program (IIAP) and became a member of IIAP. Ever since then, the interdisciplinary team of Park's and imec's researchers and engineers follow the goal to develop new protocols designed to increase production yield and device performance for the semiconductor industry. With a strong focus on practical problem-solving applications of the new JDP, the partners aim to deliver innovative 3D-Metrology features for market challenges of ever smaller semiconductor devices.
About Park Systems
Park Systems is a world-leading manufacturer of atomic force microscopy (AFM) systems with a complete range of products for researchers and industry engineers in the chemistry, materials, physics, life sciences, and semiconductor and data storage industries. Park's products are used by more than a thousand institutions and corporations worldwide. Park's AFM provides the highest data accuracy at nanoscale resolution, superior productivity, and the lowest operating cost, thanks to its unique technology and innovative engineering. Park Systems, Inc. is headquartered in Santa Clara, California with its global manufacturing and R&D headquarters in Korea. Park's products are sold and supported worldwide with regional headquarters in the US, Korea, Japan, Singapore, Germany, China and Mexico, and distribution partners throughout Europe, Asia, and the Americas. Please visit http://www.parksystems.com for more information.
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Luc Van de hove博士（imce总裁&CEO）与Sang-il Park博士（Park原子力显微镜公司总裁）
有着先进计量学解决方案的创新型原子力显微镜公司Park以及前沿的纳米电子研发与创新中心的imec，于2020年2月17日在比利时鲁汶的imec总部正式举行了签约仪式。这是合作双方在4年内签署的第二个联合开发项目（JDP），双方都致力于加大力度研发下一代的在线AFM计量解决方案。
新的JDP扩展了合作关系，以探索适用于晶圆半导体领域的AFM计量解决方案的新领域。JDP成功探索出在线自动原子力显微镜在半导体研究中的强大性能，例如表面粗糙度，临界尺寸（CD）和侧壁粗糙度；而第二个JDP则适用于多个战略性发展，以应对不断缩小规模的当前计量挑战设备和3D组件堆叠的几何尺寸。
“与imec等研究中心合作，对我们能够提供满足研究和工业市场需求的专业技术解决方案至关重要。我很高兴再次与imec合作，进行此项探索。我也期待着进一步的合作卓有成效。”Park原子力显微镜公司CEO Sang-il Park博士评论道。
Kristof Paredis博士（imec研发经理）补充说：“Park公司在过去几年里取得了长足发展，这无疑对我们与Park的共同开发工作有很大帮助。我们刚签署的联合开发项目也展现了我们之间真诚美好的合作关系。”。
在2015年初次签署JDP后，Park原子力显微镜公司正式加入了imec的工业联盟计划（IIAP），并成为IIAP的重要成员。从那时起，Park和imec中以研究员和工程师为主的跨学科团队夜以继日研发，旨在提高半导体行业的生产良率和器件性能。为了应对越来越精巧化的半导体器件的市场挑战，合作双方将重点放在新型JDP的实际问题解决应用程序上，创新的3D计量学功能将应运而生。
