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Large Sample AFM Revealed
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Key Features
High-Precision & Versatile Performance
  • • Ensures minimal thermal drift and exceptional stability with an advanced mechanical structure
  • • Accommodates a wide range of sample sizes, from small specimens to 300 mm wafers
  • • Supports advanced Park AFM-IR Spectrometers (PiFM) for precise chemical analysis
Simplified Workflow with Automated Features
  • • Automatic probe exchange with 16 slots for efficient multi-experiment setups
  • • Streamlines setup with automated tip mounting and laser beam alignment
  • • StepScan™ feature for automated sequential measurements at multiple coordinates
  • • Macro optics with wide field of view, covering 200 mm wafer samples
Specialized Features for Industrial AFM Applications
  • • Specialized industrial R&D applications with recipe-based routine measurements.
  • • Integrated industrial-grade facility featuring a signal tower with an emergency-off unit, a facility controller, and optional contamination control solutions using a fan filter unit
Park FX200 Smart Simulator
Explore Park Systems' AFM technology anytime, anywhere. 
Experience real scan scenarios and results without hardware or delays. Instant, interactive, and hassle-free — see what’s possible today.
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Park AFM-IR Spectrometers
Advanced Park AFM-IR Spectrometers for Large Sample Chemical Analysis
Park AFM-IR Spectrometers combines IR spectroscopy and AFM in a single system. It enables chemical identification with <5 nm spatial resolution using a safe, non-contact method. The AFM provides 3D nanometer topography with sub-angstrom accuracy and mechanical property insights.
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Which Large Sample AFM is right for you?
FX200_img
FX200_img
Park FX200
The most advanced AFM for 200 mm samples
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FX300_img
FX300_img
Park FX300
The most advanced AFM for 300 mm samples
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Applications
Semiconductor
Patterned Si Device
Semiconductor
Cu Pad
Polymer
Hyper-branched Polymer
Polymer
Polystyrene Beads
2D Materials
tBG on hBN
Nanoelectrical Applications
Perovskite
Nanomechanical Applications
Battery Film Diaphragm
Nanoscale IR Spectroscopy
e-Beam Damage on ArF Photo Resist
Unlock FX200 Advantage
Transform your AFM workflows with powerful automation
The FX200 is the latest large-sample Atomic Force Microscope (AFM) designed to enhance nanoscale surface analysis with advanced automation. This technical note provides a detailed overview of its key features, automation capabilities, improved sample navigation, StepScan technology, and experimental management system.
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