18 Oct 2023
Microscopic Mapping: Post Application Treated Silanefilm
Spectrocopic Imaging Ellipsometry (SIE):
Microscopic Mapping: post application treated silane films
Material:
Si/SiO 2-substrate with an applied layer of (3-Glycidyloxypropyl)-
trimethoxysilane (GLYMO)
Experimental:
Delta and Psi-Maps were recorded with an spectroscopic imaging ellipsometer nanofilm_ep4 at a
wavelength of 400 nm. The system was equipped with a 10x objective and the focus scanner was used.