Scanning Capacitance Spectroscopy for Dopant Analysis on Nanoscale Semiconductor Devices
Speaker : Phil Kaszuba Affiliation : Global Foundries Region : US Year : 2019 Language : English Explore the intricate world of semiconductor analysis using Scanning Capacitance Spectroscopy. Uncover the root causes of device malfunctions through meticulous dopant profiling, offering valuable insights into advanced technologies. Join us in deciphering the nuances of dopant analysis.
