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SKKU Imprint Hole Polydimethylsiloxane BoronNitride NanoLithography ThermalDetectors SPMLabs Pyroelectric Mechanical Current plastic TCS Fe_film Sapphire Lateral flakes IVSpectroscopy Ceramics Terrace Optoelectronic Fiber Modulus Ptfe non_contact Sadowski Bacterium Flake PDMS Anneal Mosfet LiNbO3 rubber CP-AFM Leakage