Park NX-PTR Specifications
System
Specification
Motorized XY stage
travels up to 200 mm × 200 mm, 2 µm repeatability
Motorized Z stage
25 mm Z travel distance
0.1 µm resolution, < 1 µm repeatability
Motorized Focus Stage
15 mm Z travel distance for on-axis optics
Tilting stage
tilt angle: ±1.8°
resolution: 3.28㎚ for 50㎛
Sample Thickness Allowance
up to 20 mm
Full scan range Z run-out
< 2 nm
COGNEX Pattern Recognition
pattern align resolution of 1/4 pixel
Scanner Performances
XY Scanner Range
100 µm × 100 µm
XY Scanner Resolution
0.095 nm (20 bit position control)
Z Scanner Range
15 µm
Z Scanner Resolution
0.01 nm
AFM and XY Stage
Control Electronics
ADC
18 channels
4 high-speed ADC channels
24-bit ADCs for X,Y and Z scanner position sensor
Maximun Scan Size
4096 x 4096 pixels
DAC
17 channels
2 high-speed DAC channels
20-bit DACs for X,Y and Z scanner positioning
Vibration, Acoustic Noise, and ESD Performances
Floor Vibration
< 0.5 µm/s (10 Hz to 200 Hz w/ Active Vibration Isolation System)
Acoustic Noise
>20 dB attenuation w/ Acoustic Enclosure
Facility Requirements
Room Temperature (Stand By)
10 °C ~ 40 °C
Room Temperature (Operating)
18 °C ~ 24 °C
Humidity
30% to 60% (not condensing)
Floor Vibration Level
VC-D (6 µm/sec)
Acoustic Noise
Below 65 dB
Pneumatics
Vacuum : -60 kPa
Power Supply Rating
100/120 V/ 208~240 V, single phase, 15 A (max)
Total Power Consumption
2 KW (typical)
Ground Resistance
Below 100 ohms
Options
Customized Sample Fixture
Park Systems can prepare customized sample fixtures to support customers’ specific samples, row bars or individual sliders. The customized sample fixture guarantees a superior connection between the measuring sample and the XE-PTR.
Automatic Tip Exchange (ATX)
Automatic Tip Exchange performs fully automated tip exchanges in order to seamlessly continue automated measurement routines. It automatically calibrates cantilever location and optimizes measurement settings based on measurements of a reference pattern. Our novel magnetic approach to the tip exchange yields a 99% success rate, higher than the traditional vacuum techniques.
Ionization System
Ionization system effectively removes electrostatic charges. It ionizes the charged objects and is very reliable since the system always generates and maintains an ideal balance of positive and negative ions without causing any contamination to the surrounding area. It also reduces the accidental electrostatic built-in charge that may occur during sample handling.
Dimensions in mm
& Weight in kg
Acoustic Enclosure
880 (w) × 980 (d) × 1460 (h)
620 kg approx. (incl. basic NX-HDM System)
Control Cabinet
600 (w) × 900 (d) × 1600 (h)
170 kg approx. (incl. controllers)
System Floor Space
1720 (w) × 920 (d)
Ceiling Height
2000 or more
Operator Working Space
2400 (w) × 2450 (d), minimum (dimension unit: mm)
[ Park NX-PTR system dimension ] / [ Park NX-PTR installation layout ]