Park Nanostandard Store
Grating Pattern Calibrator (GPC)
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Option Description
The grating pattern calibrator, GPC is a reference material to check the measurement capability of slope in AFM measurement. It can be used to characterize the scanner nonlinearity in the vertical direction.
Manufactured by Kims Reference Corp. (internationally accredited reference materials producer from ILAC-MRA and KOLAS via ISO-17034)
Specifications
- Edge angle: 54.7°
- Pitch: 10 μm
- Width: 8 μm
- Step height: 1.75 μm
- Chip size: 5 mm × 5 mm
- Material: Si
- Substrate: Circular coupon (Ф 20 mm)
- Traceability: Not certified
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