利用原子力显微镜对半导体制造中的缺陷进行检测与分类
Sang-Joon Cho, Vice President and director of R&D Center, Park Systems Corp. Ilka M. Hermes, Principal Scientist, Park Systems Europe. 利用原子力显微...
高真空中二维材料的表面电位测量
J. Serron, A.Minj, L. Wouters, T. Hantschel IMEC, Leuven, Belgium 介绍: 随着传统场效应晶体管 (FET) 的逐渐规模化,如何克服短沟道效应的不利影响变得越...
充分发挥潜力 通过边带KPFM对分子聚集体进行电势成像
通过边带KPFM对分子聚集体进行电势成像 Ilka M. Hermes, Andrea Cerreta Park Systems Europe GmbH, Mannheim, Germany 功函数是一种材料特性,可用于区分复合材料中的...
Making the connection. Atomic force microscopy correlates Graphene’s functional properties on the nanoscale
Making the connection. Atomic force microscopy correlates Graphene’s functional properties on the nanoscale Ilka M. Hermes,1 Simonas Krotkus,2 Ben Conran,3 Clifford McAleese,3 Xiaoche...
原子力显微镜与边带开尔文力探针显微镜原理与应用相关的比较研究
Research Application Technology Center, Park Systems Corporation Introduction Since the development of Atomic Force Microscopy (AFM) [1], several measurement modes have been developed to cha...
先进材料在高真空环境下的电学特性改善
John Paul Pineda, Charles Kim, and Byong Kim Park Systems, Inc., Santa Clara, CA USA Introduction Sophisticated, high-performing technology often requires electrical components with advance...
基于阳极氧化的接触式原子力显微镜纳米光刻技术
Armando Melgarejo, Ben Schoenek, Jiali Zhang, and Byong Kim Park Systems, Inc., Santa Clara, CA, USA Introduction The field of nanotechnology has diversified into different areas of researc...
Carrier Profiling in High Vacuum Using Scanning Spreading Resistance Microscopy and Scanning Capacitance Microscopy
Lennaert Wouters1, Albert Minj1,2, Umberto Celano1, Thomas Hantschel1, Wilfried Vandervorst1,2, Kristof Paredis1 1IMEC, Leuven, Belgium 2Department of Physics and Astronomy, University of Leuven, Le...
利用双频谐振追踪,稳定压电响应,以实现精确无串扰的铁电畴特性
Ilka Hermes1, Romain Stomp2 1Park Systems Europe, Mannheim, Germany 2Zurich Instruments, Zurich, Switzerland 介绍 铁电材料由于其独特的机电特性和电学特性,在工业上得到...
High Resolution Phase Imaging of Polymer Thin Film Coated on Gold (Au)
High Resolution Phase Imaging of Polymer Thin Film Coated on Gold (Au) John Paul Pineda, Charles Kim, Byong Kim, and Keibock Lee Park Systems Inc., Santa Clara, CA USA INTROD...
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